|Rotational Jitter of Mirror||Time Variation Display||→ Analysis of Rotational Deviation|
|Accuracy of Mirror Surface
||→ Possibility to evaluate the entire surface of the mirror
|Fixed Accuracy of mirror
||→ Evaluation of high resoulution
The reflection at the point A on a mirror surface is detected by Detector A, and the other reflection at point B on the same surface is detected by Detector B.
Rotational jitter of the motor, which is fixed with polygon mirror, is evaluated with a Time-interval measurement (A to B) using the TA320. Transient analysis of motor is available using the time variation display of the TA320.
Long term jitter indicates rotational jitter of the motor.
Short term jitter measures the data from one rotation of the mirror, so the deviation made by each surface distortion can be evaluated.
If the Polygon scanner mirror is fixed with any tilt, the reflected laser beam through the V-slit is modulated by the tilt.
TA320 can analyze the tilt by measuring the pulse width.
The TA320 Time Interval Analyzer is an instrument which can measure the period, pulse width and time interval of a signal continuously at a maximum rate of 14 MS/s with a maximum resolution of 100 picoseconds. The large liquid crystal display panel is equipped with a touch-sensitive screen, enabling an intuitive, smooth operation in measurement and data analysis. A high screen-update rate allows the immediate display of analysis results.