Source Measure Units

Source and Measure with a Single Unit

SMUs bring precision sourcing and measurement together in a single, unified instrument. Designed for modern semiconductor and electronic component testing, they deliver stable voltage and current output while capturing high-resolution measurement data in real time. This tight integration reveals device characteristics that traditional bench setups often miss, enabling faster, more confident design decisions.

With wide dynamic ranges, low noise, and smooth transitions between operating modes, SMUs support everything from simple biasing to advanced I-V sweeps and pulse testing. Engineers rely on them to characterize diodes, transistors, sensors, and silicon photonics with accuracy and repeatability.

By consolidating multiple instruments into one, SMUs simplify test setups, reduce measurement uncertainty, and streamline workflows in R&D, design validation, and production test.

  • Easy-to-use touch panel
  • 3 and 9-slot frame controllers
  • Hot-swappable reconfiguration
  • Synchronized trigger I/O by frame or module
  • USB, Ethernet, GPIB (optional)
  • 2-Channel
  • Ranges: ±6 V, ±600 mA
  • Resolution: 100 µV / 1 pA
  • Sweep: Linear, Log, Custom
  • Output: DC, Pulse (50 µs to 1 s)
  •  
  • 2-Channel
  • ±50V / ±1.2A or ±18V / ± 3.2A
  • Resolution: 1 µV / 1 pA
  • Sweep: Linear, Log, Custom
  • Output: DC, Pulse (50 µs to 3600 s)
  • 1-Channel
  • ±110V / ±0.5A or ±12V / ±3.2A
  • Resolution: 1 µV / 100 pA
  • Sweep: Linear, Log, Custom
  • Output: DC, Pulse (50 µs to 3600 s)
  • Ultra low noise (3 µVp-p)
  • 10/100mV, 1/10/30V
  • Resolution: 100 nV / 10 nA
  • Max. Output: ±200 mA (at 1/10/30V)
  GS200 GS610 GS820
Function
Generation Voltage or Current Voltage or Current Isolated 2 Channel
Voltage/Voltage
Current/Current
Voltage/Current
Generation Mode DC or Pulse DC or Pulse DC or Pulse
Voltage Generation 10mV to 30V
Resolution:100 nV
200 mV, 1 µV
Resolution: 110 V
200 mV, 1 µV
Resolution:18 V
Current Generation 1mA to 200 mA
Resolution at 10nA
20 µA, 100 pA
Resolution to 3.2 A
200 nA, 1 pA
Resolution to 3.2 A
Sweep Modes Linear, Log, Program Linear, Log, Program Linear, Log, Program
Measurements Voltage, Current, Resistance Voltage, Current, Resistance Voltage, Current, Resistance
Data Storage Up to 10K Data Points Up to 65.5K Data Points Up to 100K Data Points
Pulse Width 10 µsec or greater 100 µsec to 3600 sec,
1 µsec resolution
50 µsec to 3600 sec,
1 µsec resolution
Period Time 0.1 sec to 3600 sec 1 mS to 3600 sec,
1 µsec resolution
100 µsec to 3600 sec,
1 µsec resolution
Output Noise (Typical) 100 µVp-p
(10 V range,
DC to 10 kHz)
3 µAp-p
(100 mA range,
DC to 10 kHz)
8 mV P-P DC
to 20 MHz
20 mV P-P DC
to 20 MHz
Interface GPIB and USB Standard GPIB, USB & RS232 Standard, Ethernet Optional GPIB, USB, RS232 and Ethernet all standard
Application Note
Overview:

Source measure units are versatile devices that can precisely source, as well as monitor voltage and current. Because of this, there are numerous applications where these devices find use cases. 

Overview:
  • Parametric characterization of DC-DC converters using source measure units
  • GS 610, 820
  • Purposes include stable power supply and providing stimulus to circuit to measure response
Overview:

Source measure units combine the best features of power supplies and digital multimeters and have numerous applications ranging from battery simulators, semiconductor characterization, and efficiency testing on power electronics. 

Industries:
Overview:
No, the GS610 and the GS820 cannot be used solely as a DMM to measure only voltage. This is because the Sense terminal cannot be separated from the Output terminal on the instrument. The GS Series uses the Output ...
Overview:

The AC Power Input in all Yokogawa instruments is designed as a 3-pin connection (one of which is a GND pin). In some parts of the world, PCs are sold with AC power cables that are 2-pin. Often times this means the ...

Overview:
Unfortunately, we cannot upgrade a GS200 to add the /MON option. The GS series instruments, which includes the GS610 and GS820, cannot be retrofitted or upgraded with new options after the initial purchase. All ...
Overview:

The following attached document details the typical output noise of the GS200 Voltage / Current Source from DC to 20 MHz.

Overview:

This is a list of command mnemonics which can be used to describe the GS610 Source Measure Unit program pattern file.○:Setting has changed successfully△:Setting has been received but failed×:Setting has not been ...

Overview:

The GP-IB command of the GS200 DC Voltage / Current Source shares the same mode as the 7651. It can be switched to 488.2 mode.

Overview:

It is possible to connect multiple GS units in series/parallel connections to boost the maximum voltage/current, provded the values are within the range of maximum voltage/current of those limiters. To amplify the ...

Overview:

The GS610/GS820 Multi Channel Source Measure Unit output is insulated from the cover case. Therefore, if you want to amplify the output voltage more than 1 unit (or 1 ch) you must connect the system in series. If you want to increase the output ...

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