Source Measure Units

Source and measure, all in one unit

Before semiconductor devices and other electronic components can undergo commercial deployment, they must be characterized under a variety of environmental and functional testing to ensure conformity to specifications. Traditional benchtop testing involving a pair of digital multimeters and power supplies is often cost-prohibitive and time-consuming. A standalone, highly accurate, and highly functional device would be best suited to handle these applications. The source measure unit (SMU) provides:


  • SMU's combine the functionality of several devices including digital multimeters, power supplies, current sources, ohmmeters, and function generators into a compact, standalone device
  • Can be used as a storage device for data recording and transferring or as part of a larger test system


  • Source and measure hundreds of volts to all the way down to the microamp range, without losing resolution or speed


  • Seven modes of operation for any situation including VS/IM, VS/VM, IS/VM, IS/IM, VS, IS, and VS/IM or IS/VM*
  • Special software for performing I/V curve tracing
  • A host of specialized functions for semiconductor testing including built-in and custom sweeps, ramps, and pwm. 

1. VS = Sourced Voltage
2. IM= Measured Current
3. IS= Sourced Current
4. VM = Measured Voltage

The GS610 is made up of a programmable current and voltage source, a voltmeter, and an ammeter. Each function can be combined into numerous operation modes.

  • Yokogawa source measure unit GS820
  • Precision SMU quick response for automated testing
  • High-speed communication improves productivity
  • Customizable to enable any test

The GS200 is a low voltage/current DC source with high accuracy, high stability, and high resolution.



Yokogawa's instruments go beyond conventional options. They are highly accurate, highly functional with programmable voltage/current source that incorporates voltage/current generation for a broader application.







Voltage or Current

Voltage or Current

Isolated 2 Channel Voltage/  Voltage Current/Current  Voltage/Current

Generation Mode

DC or Pulse

DC or Pulse

DC or Pulse

Voltage Generation

10mV to 30V

Resolution to 100 nV

200 mV, 1 µV Resolution to 110 V

200 mV, 1 µV Resolution to 18 V

Current Generation

1mA to 200 mA

Resolution at 10nA

20 µA, 100 pA Resolution to 3.2 A

200 nA, 1 pA Resolution to 3.2 A

Sweep Modes

Linear, Log, Program

Linear, Log, Program

Linear, Log, Program


Voltage, Current, Resistance

Voltage, Current, Resistance

Voltage, Current, Resistance

Data Storage

Up to 10K Data Points

Up to 65.5K Data Points

Up to 100K Data Points

Pulse Width

10 µsec or greater

100 µsec to 3600 sec,  1 µsec  resolution

50 µsec to 3600 sec,  1 µsec  resolution

Period Time

0.1 sec to 3600 sec

1 mS to 3600 sec, 1 µsec resolution

100 µsec to 3600 sec,  1 µsec  resolution

Output Noise (Typical)

100 µVp-p (10 V range, DC to 10 kHz)

3 µAp-p (100 mA range, DC to 10 kHz)

8 mV P-P DC to 20 MHz

20 mV P-P DC to 20 MHz


GPIB and USB Standard

GPIB, USB & RS232 Standard,  Ethernet Optional

GPIB, USB, RS232 and Ethernet all  standard


Application Note

Source measure units are versatile devices that can precisely source, as well as monitor voltage and current. Because of this, there are numerous applications where these devices find use cases. 

  • Parametric characterization of DC-DC converters using source measure units
  • GS 610, 820
  • Purposes include stable power supply and providing stimulus to circuit to measure response

Source measure units combine the best features of power supplies and digital multimeters and have numerous applications ranging from battery simulators, semiconductor characterization, and efficiency testing on power electronics. 


After a disastrous 2009, the large publicly held test companies enjoyed booming business in 2010.

No, the GS610 and the GS820 cannot be used solely as a DMM to measure only voltage. This is because the Sense terminal cannot be separated from the Output terminal on the instrument. The GS Series uses the Output ...

The AC Power Input in all Yokogawa instruments is designed as a 3-pin connection (one of which is a GND pin). In some parts of the world, PCs are sold with AC power cables that are 2-pin. Often times this means the ...

Unfortunately, we cannot upgrade a GS200 to add the /MON option. The GS series instruments, which includes the GS610 and GS820, cannot be retrofitted or upgraded with new options after the initial purchase. All ...

The following attached document details the typical output noise of the GS200 Voltage / Current Source from DC to 20 MHz.


This is a list of command mnemonics which can be used to describe the GS610 Source Measure Unit program pattern file.○:Setting has changed successfully△:Setting has been received but failed×:Setting has not been ...


The GP-IB command of the GS200 DC Voltage / Current Source shares the same mode as the 7651. It can be switched to 488.2 mode.


It is possible to connect multiple GS units in series/parallel connections to boost the maximum voltage/current, provded the values are within the range of maximum voltage/current of those limiters. To amplify the ...


The GS610/GS820 Multi Channel Source Measure Unit output is insulated from the cover case. Therefore, if you want to amplify the output voltage more than 1 unit (or 1 ch) you must connect the system in series. If you want to increase the output ...



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