Linearity Improvement and Synchronous Measurement Technology for Developing the MT300 Digital Manometer

Yokogawa’s MT series digital manometers equipped with a silicon resonant sensor have excellent long-term stability and are widely used in various industries for manufacturing, research and development, and calibration. An MT series digital manometer was selected by national metrology institutes as a transfer standard for the international comparison of national pressure standards. However, there is still room for improving linearity. Yokogawa thus developed a new adjustment method through collaborative research with the National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology (NMIJ/AIST) and incorporated it into the new MT300 digital manometer. This paper describes this adjustment method, evaluation results obtained from NMIJ/AIST, and a synchronous measurement technology used in this method.